光栅颜色滤波器的设计与性能研究

光栅颜色滤波器的设计与性能研究(论文11000字)
摘要：根据金属光栅在可见光波段(400-760 nm)的电磁波传输及异常透射特性，设计并实现了一种由衬底、介质-金属复合结构以及金属光栅层组成的彩色滤波器。采用有效介质理论(EMT)结合严格耦合波分析(RCWA)方法系统分析了结构参数对透射光谱的影响，结果表明所设计的光栅结构可以有效提高滤波器的角度容忍性。得到了红绿蓝(RGB)三色滤波器优化的结构参数，获得同时具有高透射率和角度不敏感的光谱输出。最终结果显示：红色对应的滤波器谐振波长705 nm，透射率极值达到66.4%；绿色对应的滤波器谐振波长590 nm，透射率极值81.24%；蓝色对应的谐振波长452 nm，透射率极值为81.23%。
关键词：金属光栅；彩色滤光片；表面等离激元；角度容忍；严格耦合波分析 

Design and performance research of the color filter based on grating structure
Abstract:A polarizing color filter bases on sub-wavelength metallic gratings is proposed to work in the visible wavelength range, which is consisted of top metallic grating, dielectric-metallic composite layer and the substrate. The effects of the structural parameters of the designed components are studied in detail by rigorous coupled wave analysis (RCWA) and effective medium theory (EMT). The optimal parameters are obtained, in which more than 70% transmission with large angle tolerances. For the red color, the central wavelength is 705 nm and its corresponding transmittance is 66.4%. For the green color, the central wavelength is 590 nm and its corresponding transmittance is 81.24%. While for the blue one, the central wavelength is 452 nm and its corresponding transmittance is 81.23%.
Key Words:Metallic gratings; Color filters; Surface plasmon; Angle tolerance; Rigorous Coupled Wave Analysis
 
目  录
1引言    1
1.1颜色滤波器概述    1
1.2基于微纳结构的亚波长颜色滤波器    1
1.2.1亚波长光栅中的导模共振现象    1
1.2.2亚波长光栅颜色滤波器的分类和结构    2
1.3本文的研究内容    4
2彩色滤波片相关理论    4
2.1光波的基本电磁理论    4
2.1.1麦克斯韦方程组和物质方程    4
2.1.2边界条件    5
2.2表面等离激元    6
2.3一维亚波长光栅严格耦合波分析法    10
3一维亚波长光栅颜色滤波器的设计    16
3.1设计理论    16
3.2设计模型    17
4计算结果与理论分析    18
4.1亚波长光栅颜色滤波器的滤光特性    18
4.2光栅层厚度对等离子共振效应的影响    19
4.3亚波长光栅颜色滤波器的角度容忍性    20
5总结与展望    21
5.1总结    21
5.2展望    21
参考文献    23
致谢    25